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TSMC Launches EUV Energy Saving Program to Cut Power Consumption by 2030

TSMC's new energy-saving program aims to cut power use by 190 million kWh and reduce emissions by 101 kilotons by 2030. The project begins this year at select fabs.

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TSMC Launches EUV Energy Saving Program to Cut Power Consumption by 2030

Taiwan Semiconductor Manufacturing Company (TSMC), the world's leading semiconductor foundry, has initiated the EUV Dynamic Energy Saving Program. This ambitious project aims to significantly reduce energy consumption and contribute to global sustainability goals.

TSMC, responsible for approximately 9% of Taiwan's total energy consumption, aims to make a substantial impact with this new program. The company projects that by 2030, this initiative will result in energy savings of 190 million kilowatt-hours and a reduction in carbon emissions of 101 kilotons.

The EUV Dynamic Energy Saving Program began its rollout in September 2025 at Fabs 15B, 18A, and 18B. TSMC plans to start with select companies and gradually expand the program across its entire global EUV tool fleet by 2027.

TSMC's success in reducing energy consumption by 24% in mid-2024 for its EUV litho systems has laid a strong foundation for this program. The company's enhanced fab-level automation has further improved efficiency, reducing peak energy draw by 44% without compromising output, quality, or yields. TSMC is also exploring the possibility of applying dynamic energy control mechanisms to DUV scanners and other machinery.

TSMC's EUV Dynamic Energy Saving Program is set to complete full deployment across its entire EUV tool fleet by the end of the year. This significant investment in energy efficiency not only benefits TSMC's operations but also contributes to global efforts in reducing carbon emissions and promoting sustainability.

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